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    • Services
      • Nano Fabrication
      • Material Characterization
      • Semiconductor IC Testing
      • Materials Testing Lab
      • Electronics Testing Lab
      • Nano Bio Tech
      • Electron Microscopy Lab
      • X Ray Inspection Facility
      • Polymer Rubber Test Lab
      • In Vitro Study
      • Mechanical Testing Lab
      • Consumer Testing Lab
    • Contact Us
    • IC Failure Analysis Lab
    • About Us
      • Our Mission
      • Jobs
    • Blog
  • Home
  • Services
    • Nano Fabrication
    • Material Characterization
    • Semiconductor IC Testing
    • Materials Testing Lab
    • Electronics Testing Lab
    • Nano Bio Tech
    • Electron Microscopy Lab
    • X Ray Inspection Facility
    • Polymer Rubber Test Lab
    • In Vitro Study
    • Mechanical Testing Lab
    • Consumer Testing Lab
  • Contact Us
  • IC Failure Analysis Lab
  • About Us
    • Our Mission
    • Jobs
  • Blog

Micro Nanofabrication services

Custom Photolithography Nanofabrication Services - Nanowatts Technologies

Nanofabrication and Foundry services

Are you looking for unique clean room nanofabrication wafer processing services for your company to iterate and test nano devices. Let us know your needs and our staff will assist you all the way. We also provide microfluidic medical device fabrication services equipped electronic packaging prototyping lab facilities. 

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Semiconductor Device Manufacturing Services Nanowatts
Prototype Proof of Concept Device Fabrication Nanowatts Technologies

Process Integration Services

  • Mask design and Direct writer. 
  • Chrome Mask Fabrication.
  • Wet etch, RCA Cleans and Material wet chemistry engineering.
  • Thick and Thin photoresist, SU8, PDMS, PMMA, HMDS application.
  • E-beam, Stepper, ASML and UV Photolithography. Shadow and Stencil mask processing. 
  • Dry Etch: DRIE, Bosch Etch. 
  • Anneal, Doped-Si, Doped Poly Si, RTP, Drive-ins, Diffusion and Oxidation.
  • Metrology and Ellipsometry. 
  • Thin Films : PVD, Sputter, PLD, Dual DC-RF sputter, Metal and Metal-Ox Thin film deposition, Lift-off process.
  • Wafer Dicing and Wafer Bonding.
  • PECVD : SiNx, SiOx, GeOx, Ozone, Plasma Enhanced CVD.
  • Atomic Layer Deposition. 
  • MEMS/NEMS Critical Point Dryer.
  • Electronics Packaging.


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Hall Mobility Bar Nanofabrication steps Nanowatts Technologies
Test your device performance

Hall Mobility Bar Fabrication

  • Substrate selection and preparation.
  • Metal contacts deposition and lift offs.
  • E-beam and Optical lithography Hall Bars fabrication
  • Dry Etch and Wet Etched Inverse Lithography.
  • Hall Mobility Device Electrical Characterization.

Visit our Failure analysis Lab

Find out more
Silicon MEMS Membrane Nanofabrication Nanowatts

Membrane Fabrication Services

  • Substrate selection for SOI and other substrate 
  • Back side deep trench wet and dry etch 
  • Dielectric, contacts and Vias fabrication
  • Active layers, Electrodes and sealing
  • Membrane release and Back grinding
  • Applications : Pressure Sensors, Accelerometers, Microphones, Optical Modulators, BioMed Devices, Energy harvester device

Visit our Semiconductor Testing Lab

IC TEST LAB
ZnO nanowire growth nanorod gas sensors Nanowatts
Process integration on to device substrates

Nanowire Nanorod Nanotubes

  • Physical Vapor Deposition and thermal growth
  • CVD Vapor Liquid Solid growth 
  • Sol-gel and Hydrothermal based synthesis 
  • Bottom-up and template based growth
  • Direct nanowire process integration to substrates
  • Applications : Field Emission Devices, Quantum dots, Chemical gas sensors, Energy converters, Battery, Qubit devices

Microfluidics Devices

Lab on Chip Microfluidics Fabrication

  • PDMS and PMMA Stamps
  • Design and simulation for the suitable microfluidics chip.
  • Reverse engineering from scientific literature and needs for your research and experimental strategy. 
  • SU8 Deep trench molds and high aspect ratio sidewalls. 
  • PDMS and PMMA Microchannels fabricated from soft lithography from SU8 photo patterning on Silicon wafer.
  • O2 Plasma surface treatment.  
  • PMMA chips be ready by bonding on glass.
  • Nanobiotechnology Services Lab

UV Photolithography Chromium Glass Mask making Services
Photolithography Reticles and Shadow Masks

Photo Mask Making Services

  • Mask layout engineering, Synthesis and Verification.
  • LRC VRC CCRC checksum and correction for GDS II foundry mask file conversion. 
  • Mask design support with in house CAD software's.
  • Direct Laser writer services.
  • Scribe channel, manufacturing structures design.
  • Full device solutions with prototyping services.  

Visit our IC Failure Analysis Lab

Go To IC Lab

Wet etch and chemistry solutions

Wet etch and chemistry solutions

Wet etch and chemistry solutions

  • 4 inch to 8 inch CMOS pre RCA clean, Nitride and Oxide etch, Non metal TMAH and KOH wet etch and Si - Texturing.
  • Resist strip, Aluminum, Gold, Copper and Titanium metal wet etch stations.
  • Solvent solutions bench for lift off and ultrasonicator surface cleans.
  • Other standard and non standard wet chemistry and HF vapor etch system available.  
  • Critical Point Dryer (CPD) for MEMS, NEMS, Piezo structucture  dry release. IPA and other solvents.  

UV and E-beam Photolithography

Wet etch and chemistry solutions

Wet etch and chemistry solutions

  • Direct laser writer with 2 Micron resolution.
  • Mask writer with 3 micron resolution on Chrome mask, UV contact aligners with 2 Micron resolution.
  • ASML i-line stepper  mask and high yield litho process of 1 Micron lateral resolution. 
  • E-beam lithography with 20 Nanometer end to end resolution. 
  • Photoresist coaters and resist development process using AZ. Shipley, E-beam and think SU8 resist patterning, HMDS oven bake and LOL capabilities.
  • Full cycle metal lift off process capabilities.  

Dry Plasma Etchers

Wet etch and chemistry solutions

Oxidation, Diffusion, RTP and Furnaces

  • Support and PI with RIE, DRIE, ICP-RIE, CCP-RIE and Bosch dry etch process.
  • ICP Metal Etcher for compound Metal and Metal oxy nitride etches. 
  • Primary materials:  Al, Al-Si, SiO2, SiN,Ti, TiN, W,  Poy Si, Metal, InGaP, GaN, AlGaN and passivation. 
  • Reactive Ion Etcher and ion mill for contact dry etch and TEM and FEI sample preparation.
  • Available gases:  Ar, BCl3, CF4, Cl2, Sf6, CHF3, CF4, HBr, NF3, and O2. Surface O2 descum. Resist asher and strippers.  
  • Plasma resist Strippers. 

Oxidation, Diffusion, RTP and Furnaces

Thin Films Metalization and Atomic Layer deposition ALD

Oxidation, Diffusion, RTP and Furnaces

  • Dry and Wet Oxidation pyrogenic furnace operating up to 1200 C supporting multiple ambient gas, Vacuum furnaces.
  • Solar and CMOS POCL3.
  • Solar and CMOS BBr3.
  • Contact anneal and activation doping and drive-in's setups. 
  • Rapid Thermal Anneal RTP for Contact anneal and Activation.
  • Nitridation and Silicidation.
  • Ion Implant activation and drive-ins. 

Thin Films Metalization and Atomic Layer deposition ALD

Thin Films Metalization and Atomic Layer deposition ALD

Thin Films Metalization and Atomic Layer deposition ALD

  • E-beam Evaporator
  • RF, Dual RF/DC Sputter.
  • PLD, Thermal evaporator.
  • Common metals and Metal Oxide includes: Al and Al2O3, Cr and Cr2O3, Pt, Si, Ti, TiOx, Ru, ZrO2 and ITO. 
  • Plasma and Thermal Atomic Layer depositions. 
  • Low temperature, Flexible substrates.
  • Films: AlOx,TiO2, HFO2, ZnOx, TaO5, Ga2O3 and more. 
  • Inkjet Electronics Printer for liquid metal inks, contacts on Silicon and flexible substrates.  

Plasma Enhanced PECVD and Low Pressure CVD

Thin Films Metalization and Atomic Layer deposition ALD

Thin Films Metalization and Atomic Layer deposition ALD

  • High Density Plasma for low temperature ( as low 100 C) for SiNx and SiOx deposition. 
  • CCP-PECVD programmable dual frequency operation for precise stress control oxy nitride thin films.
  • Gasses for PECVD includes N2O, SiH4, NH3, Ar, SF6 chemistry.    
  • BPSG SiO2 deposited as low as 300, low pressure (~350 mtorr). 
  • TEOS, BPSG
  • Carbon nanotube, MOCVD ,LTO and SiGe. 

Prototype Device and Proof of concept MVP's building services Nanowatts

Prototype development

  • Substrate Process Integration : Silicon, Silicon on Insulator, Quartz, Glass, GaAs,  InGaP, GaN, AlGaN, PDMS, PMMA, 156x mm 125x mm solar pseudo squares,  Polymer and Flexible cleanroom compatible substrates.
  • Inkjet Metal contact printing, Nanowires, Nanotubes and Graphene prototype and process support. 
  • Bio-Sensors, Nanoneedles, PDMS, PMMA assay chips, Nano and Microfluidics devices, lab on chip fabrication. 
  • Opto Electronics and Nano Photonics.  Gratings and optical waveguide on SOI and Si fabrication and integration. 
  • RF CMOS - MMIC Phase shifters, Filters, Oscillator, Circuit switch, Inductor, Varactor design and RF Antenna design & process integration. 
  • CMOS, Metal Insulators MIM, Passives, Diodes, Ring oscillators, Interconnect and TFT and EAD Tags proof of concept design and fabrication.

Build MVP's

Are you looking for flexible clean room nanofabrication wafer processing services for your company to iterate proof  of concept MVP's. We're all ears. We apply strict NDA. 

Contact nanowatts

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Nanofabrication Wafer Processing Services

Mask layout engineering and Mask design services Nanowatts Technologies

Circuit Design, Verification, Mask Design and Mask Making.

  • Mask layout engineering, Synthesis and Verification.
  • Lrc Vrc Crc checksum and correction for GDS II foundry mask file conversion. 
  • Layout design for 4-point probe structure and van der paum test structures to extract Sheet resistance, Contact chain, Contact resistance. Continuity and channel Isolation.
  • Channel design, ring oscillators, amp circuit and stringers on Dual well CMOS TFT EAD tags design.
  • Test and pad structure design to extract Threshold Voltages, Transconductance, Body effect, Channel doping simulation. 
  • Channel mobility extraction, Channel length modulation, Break down structures.  
  • GDS II GLOBALMARKS  pattern generation for ISO, P-WELL regions for NMOS, GATE  patterns for wiring and MOS gates, N-DOPE & P-DOPE well definition, CONT active layers, and contact METAL pads for wiring and via interconnects. 


Semiconductor Metrology and UV Photolithography services at Nanowatts Bangalore India

Metrology and In-Line Characterization

  • Spectroscopic Ellipsometry for thickness and optical properties ( n, K values) for single to multilayer thin films.  Thickness 3D mapping and needed application. 
  • In line 20 X to 500 X digital optical and dark field microscopes.
  • Metrology Atomic Force Microscopy for step height, Plasma treated surface roughness measurements. 
  • Profilometer Step height and 3D surface mapping.
  • Optical reflectometer for Resist, Polysilicon thickness.
  • 4-point Sheet resistance mapping.
  • Stress tester for tensile, compressive stress analysis. 

Microelectronics packaging, wafer dicing and wafer bonding services Nanowatts

Dicing, Bonding, Polishing and Micro Electronics Packaging

  • 4 to 6 inch wafer dice for Silicon, Glass, Quartz and bonded wafers, with protective resist coat. 
  • Chemical Mechanical Polishing (CMP) with Si and Poly Si slurry, Oxide Ultra Sol an IC PAD stiffer and topology. 
  • Low volume multi layer optoelectronics prototyping .
  • Laser bar and diode bonding with Indium, Gold and Tin. Glueing, curing  between Silicon dies and glass. 
  • Anodic bonding on 4 inch to pieces, with 0.5 micron accuracy alignment.  
  • Backgrinder and polisher to remove excess Silicon, compound semiconductor, packaging residue resin, copper posts and other compound materials. 

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Nanowatts Technologies

Technical Support :+91 9845660999 Sales :+91 8217618041

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  • Nano Fabrication
  • Material Characterization
  • Semiconductor IC Testing
  • Materials Testing Lab
  • Electronics Testing Lab
  • Nano Bio Tech
  • Electron Microscopy Lab
  • X Ray Inspection Facility
  • Polymer Rubber Test Lab
  • Mechanical Testing Lab
  • Consumer Testing Lab
  • Contact Us
  • IC Failure Analysis Lab
  • Our Mission
  • Spectrophotometer Lab
  • XRF Testing Lab
  • Blog

Nanowatts Technologies

80 ft Road, RMV 2 nd Stage, Bangalore 560094

Customer Support Help Landline : 91 8217618041

Copyright NanoWatts Technologies, Bangalore, India

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